ALOX furnace

Designed for realizing the wet thermal oxidation of III-V compound semiconductors

Real time in-situ optical monitoring

Full control and supervision of machine with two screen and a computer software

Automatic oxidation diameter control

Automatic monitoring software to stop mesa oxidation at targeted operture

Oxide aperture uniformity
σ < 0.45 µm on 6” wafer *

Selective oxidation and reproducibility of the process

Run-to-run deviation
σ < 0.05 μm *

Accurate electrical and optical confinement

Alox Specifications

● Up to 6” wafers : edge exclusion 5 mm
● Selective oxidation process
● Oxide aperture uniformity σ < 0.45 µm on 6” wafer *
● Tight flow control of moisturized gas : 0,6 to 30 g/h
● Vacuum atmosphere : <10 to 800 mbar absolute
● Stabilized temperature 350°C to 600°C
Full control / supervision of machine
● Programming of recipes
● Automatic monitoring software to stop mesa oxidation attargeted operture (optional)
● Run-to-run deviation σ < 0.05 μm *

* For common results, depending on wafer

Views of oxidation process over time

Applications

Alox furnace is destined to R&D and manufacturing of semiconductor devices in the fields of Photonics :

VCSEL

The vertical-cavity surface-emitting laser, or VCSEL is a type of semiconductor laser diode. VCSEL applications include fiber optic communications, precision sensing, computer mice and laser printers.

Laser Diodes

A laser diode is a semiconductor device. Wide range of uses that include fiber optic communications, barcode readers, laser pointers, laser printing, laser scanning and light beam illumination.

Waveguides

A waveguide is an optical structure that directs the electromagnetic waves of an optical spectrum. Widely used in : optical fiber communication, photonic integrated circuits, and optical interferometers.

Designed by AET Technologies

Our scientific partners

The universities of Berkeley in USA, and of Cardiff in Wales/UK agreed to let us use their ALOX system for demonstrations. On the process part, we benefit from the technological and scientific support granted by our CNRS/LAAS consultant.

Exhibitions

Upcoming tradeshows

Photonics West 2020

1-6 February, 2020
San Francisco, California, USA


Learn more

Semicon China 2020

18-20 March, 2020
SNIEC, Shanghai, China


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CIOE 2020

9-11 September, 2020
SZCEC, Shenzhen, China


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Semicon Taiwan 2020

23-25 September, 2020
TaiNEX 1, Taipei, Taïwan


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Alox Distributors

TAIWAN – CHINA
SINGAPORE

KROMAX
12F-1, No. 356, Sec. 5,
Nanking E. RD.
Taipei 105,
TAIWAN, R.O.C.

CHINA
 

SuZhou Pertech Technology
33G Modern Media Plaza,
265 Suzhou Avenue East,
SUZHOU 215129
CHINA

SOUTH KOREA
 

PTL
1203, Jeongja I-park,
Baekhyeon-ro 100,
Bundang-gu, Seongnam-si, 
Gyeonggi-do, KOREA

USA
 

CLEAN POWER INNOVATION
2901 Tasman drive,
Suite 210,
Santa Clara, CA 95054,
USA

UK – SCANDINAVIA
 

WEST
28-32 Bridge Street,
Leatherhead,
KT22 8BZ,
UNITED KINGDOM

EUROPE AND
THE REST OF THE WORLD

ALOXTEC
8 Chemin de Malacher,
Innovallée
38240 Meylan
FRANCE

Contact us

If you are interested in learning more about Alox and opportunities, please contact us with the form below.

Our team will be happy to answer you !