Photonics West 2018

Wet Oxidation furnace

Photonics West 2018

15 January 2018 Events
Alox Photonics VCSEL

Come visit us at booth 4210

SPIE Photonics West 2018 is the world’s largest annual event for the photonics, laser, and biomedical optics industries.

• Join thousands of your peers (scientists, engineers, and executives) at the most comprehensive technical conference and exhibition spanning biophotonics. For brain research and healthcare, lasers for research and advanced manufacturing, sensors and camera systems, imaging and displays, communications and optoelectronics, plus the core optical components that enable many of today’s consumer products.

• Photonics West featured technologies: lasers and other light sources, laser accessories, laser systems, cameras and CCD components, fiber optic components, equipment, systems, optical components, communication, optical detectors, high speed imaging and sensing, optical materials and substrates, IR sources and detectors, electronic imaging components, optical coatings, lenses and filters, positions and mounts and metrology.

AET Technologies is a French company manufacturing high temperature industrial furnaces. In this show, AET present its ALOX system, a totally innovative thermal equipment. Designed to generate and accurately monitor in real time the wet thermal oxidation of III-V semiconductors resulting of the combination of a high temperature (between 350°C and 600°C) and a wet gas flow on wafers from 100 mm up to 150 mm (4 to 6″). This tool can be designed to work in production or R&D environment in the fiels of Photonics : VCSEL, laser diodes, waveguides.

Alox was developped in cooperation with the LAAS CNRS. With over 10 machines delivered within the first year of sale, the success of the ALOX oxidation furnace designed and manufactured by AET Technologies is increasing every day. As of today, ALOX is the only equipment enabling to manually manage the oxidation of up to 6″ wafers. Its main advantage lays in its capacity to ensure a real-time monitoring of the oxidation process, hence allowing to perfectly master the targeted diameter. Its performances in terms of homogeneity and repeatability make it the most effective technology on the market. R&D laboratories well ahead on VCSEL development as well as industrial companies amongst the most important manufacturers of the market already trust us.

Learn more about SPIE Photonics West

Want an access ? Contact us